Precision Filtration for Semiconductor Manufacturing
As AI and advanced computing accelerate semiconductor innovation, Cleanova delivers custom-engineered fan filter units (FFUs), HEPA/ULPA filtration and precision environmental-control solutions for demanding semiconductor equipment and cleanroom applications.
Through Cleanova.NEXUS™ based FFU manufacturing and advanced contamination control technologies to meet demanding application requirements.
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Cleanova.NEXUS™
Built for What’s Next.
Cleanova.NEXUS brings together specialized engineering, clean-air technologies and application expertise to meet the demanding requirements of semiconductor equipment manufacturers. From wafer fabrication to metrology and inspection, our custom fan filter units (FFUs) and precision environmental control modules support ultra-clean, controlled environments. Each solution is engineered and configured around your equipment, process and performance requirements.
Precision environmental control
Custom clean-air solutions
Application support & global reach
Advanced Air and Environmental Control for Critical Environments
Cleanova.NEXUS delivers advanced filtration and cleanroom solutions for semiconductor manufacturing, data centers, AI infrastructure, and other demanding technology environments. From custom-engineered Fan Filter Units (FFUs) to specialized air filtration systems, Cleanova brings together the engineering expertise and technologies required to support critical controlled environments through its NEXUS platform.
Combining Cleanova’s filtration expertise with the specialized capabilities of SV Techsol, Airflotek and TES-Clean Air Systems, the NEXUS platform supports demanding requirements for clean air, contamination control, and precision environmental performance.
Built for the Industries Driving What’s Next
Semiconductor
Precision contamination control
Cleanrooms
HEPA/ULPA and engineered clean-air solutions
Advanced Manufacturing
Controlled environments for demanding processes
Data Centers & AI
Environmental control for high-performance infrastructure
Custom FFUs. Engineered for your Application-Specific Needs.
Cleanova.NEXUS provides custom fan filter units engineered and built in the USA for semiconductor, cleanroom and other critical environments. We manufacture custom-engineered FFUs designed around equipment interfaces, space constraints, airflow requirements and process needs.
Cleanova.NEXUS FFUs can be configured to address demanding airflow and contamination- control requirements, including chemical filtration for airborne molecular contamination (AMC) control.
Application-specific options can include fan, motor and control configurations, temperature and humidity management, specialty lighting, and ionization or electrostatic-control features, subject to technical review.
Built For What's Next
Download a copy of our Semiconductor and Cleanroom Solutions brochure.
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Targeted Static Control Solutions
Static control is crucial in front-end semiconductor manufacturing because even small electrostatic charges can contaminate wafers, damage devices, and disrupt automated tools. Effective ionization solutions safeguard yield, maintains cleanroom standards, and ensures stable, reliable processes.
Cleanova offers a range of ultra-clean ionization solutions for critical environments including in-tool and cleanroom applications. Offerings include ionizing bars, room ionization systems, ionizing blowers, ionizing air guns, and inline technologies.
Ionizing Air Gun, “Top Gun”
Ionizing Bar, Model 5645 LP
A Broader Cleanroom Capability.
Cleanova.NEXUS extends beyond individual fan filter units to support cleanroom and controlled-environment requirements with complementary air-handling, filtration and cleanroom components. The right configuration depends on the process, space, contamination-control objectives and equipment interface.
Solution Areas:
- HEPA/ULPA particulate filtration and application-specific PTFE filter media
- Mini-environments and equipment-integrated modules
- Chemical filtration and contamination-control options
- Cleanroom ceilings and lighting
- Softwall cleanrooms and enclosures
- Air showers and pass-throughs
- Replacement filters, spares and support
Talk to an Expert
Cleanova delivers advanced filtration solutions and deep technical expertise for your semiconductor and cleanroom manufacturing needs. Schedule a consultation today and benefit from our expertise for your controlled-environment applications .
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